Pulsing a Low Pressure Radiofrequency Discharge.
نویسندگان
چکیده
منابع مشابه
Low-pressure gas discharge modelling
Low-pressure gas discharge modelling is reviewed, both from a historical perspective and for current industrial applications. An ovetview of the basic mathematical and physical models used to describe low-pressure discharges is given, together with a summary of the most common numerical techniques which have been adopted. Modelling of the oc glow discharge and discharges maintained by high-freq...
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ژورنال
عنوان ژورنال: JSME International Journal Series B
سال: 1998
ISSN: 1340-8054,1347-5371
DOI: 10.1299/jsmeb.41.424